Resolution targets serve as quality control and machine performance verification devices.Microworks offers two standard kinds, as described in the Spec Sheet below.wo standard kinds, as described in t
Resolution targets serve as quality control and machine performance verification devices.
Microworks offers two standard kinds, as described in the Spec Sheet below.wo standard kinds, as described in the Spec Sheet below.
Standard Yxlon Targets
| parameter | Information |
| Outer Dimensions | 8 mm x 8 mm chip size |
Materials | Substrate: 200 μm thick silicon Absorber: 3 μm high gold |
Line/Space Widths | Tolerance: +/- 10% Pattern Line Widths [μm] 5.0, 4.0, 3.2, 2.5, 2.0, 1.6, 1.3, 1.0, 0.9, 0.8, 0.7, 0.6, 0.5, 0.45, 0.4, 0.35, 0.3 (17 steps) |
| parameter | Information |
| Outer Dimensions | 10 mm x 10 mm chip size Holder with saphire glass cover: 40 mm x 30 mm x 5 mm |
Materials | Substrate: 200 μm thick silicon |
Line/Space Widths | Tolerance: +/- 15% Pattern Line Widths [μm] 4 quadrants of 4 mm x 4 mm each; 2 modified Siemens stars featuring circular holes and 5 parallel gold lines, with line and space widths of 12 μm, 10 μm, 8 μm, 6 μm, 5 μm, 4 μm, and 3 μm at different angles. Smallest line width: 3 μm. Smallest hole diameter: 5 μm |
We offer custom resolution targets made to your specifications.
Options include particular layouts, absorber heights, device sizes, and critical dimensions.
